SPM用プローブ
KolibriSensor

クォーツチューニングフォーク

チューニングフォーク
シリコン原子像:シングルビーム水晶振動子 (ニードルセンサー)
シリコン原子像:シングルビーム水晶振動子
(ニードルセンサー)
T.An, T.Eguchi, K.Akiyama and Y.Hasegawa Appl.Phys.Lett.87,133114(2005)
(東大物性研究所)
名称 周波数
(1)Single beam Extensional 640kHz
(2)Single beam Extensional 1MHz
(3)3-beam Extensional 310kHz
(4)3-beam Extensional 500kHz
(5)3-beam Extensional 1MHz
(6)Tuning fork (E158) 32.7kHz
(7)Tuning fork 100kHz
(8)Tuning fork 307.2kHz
(9)Tuning fork 600kHz
仕様
STATEK Crystals TF TF TF TF TF TF TF TF TF
Frequency, kHz 32.768 32.768 32.768 32.768 32.768 48 50 75 80
P/N TFW-1171 3TFW-0001
TFW-1169
TFW1165 TFW-1659 TFW-1705 TFW-1701 3TFW-1696
TFW-1718
3TFW-1720 TFW-1323
Tine width-crystal, mil 15.8 10.8 8.4 6.6 4.8 6.6 8.4 6.6 8.4
Tine length, mil 120.4 103.6 92.8 84.3 70 68.8 74.6 54.7 58
Overall length, mil 195 170 143 118 95 103 125 89 108
Overall Length, mm 4.953 4.318 3.6322 2.9972 2.7432
Crystal thickness, mil 5 5 5 5 5 5 5 4 5
Rm @ air, kohm 297 313 380 481 368 200
C1, fF 2.28 2.6 2.3 2.22 1.58 1.2
Q, k 7.2 5.9 5.6 4.6 5.7 8.3
E, N/m^2 80000000000
Tine wide, mm 0.40132 0.27432 0.21336 0.16764 0.12192 0.16764 0.21336 0.16764 0.21336
Tine length mm 3.05816 2.63144 2.35712 2.14122 1.778 1.74752 1.89484 1.38938 1.4732
Thickness, mm 0.127 0.127 0.127 0.127 0.127 0.127 0.127 0.1016 0.127
Stiffness, k, N/m out-plane 575 617 667 700 889 1287 1285 1311 2734
Stiffness, k, N/m in-plane 5740 2878 1884 1219 819 2242 3626 3569 7716
STATEK Crystals TF TF TF Overtone
TF
Overtone
TF
Overtone
TF
LER LER LER
Frequency, kHz 100 163.84 163.84 200 200 307.2 643 921.6 1000
P/N TFW-1383 3TFW-1454 3TFW-1697 TFW-1482 3TFW-1480
TFW-1480
3TFW-1533
TFW1533
3EXW-1011
3EXW-1168
3EXW-0002
EXW-1057
3EXW-1073
EXW-1073
Tine width-crystal, mil 8.4 15.8 8.4 8.4 15.8 15.8 3.5 3.5 3.5
Tine length, mil 51.7 48.2 39.2 92.9 123 94.8 171.5 120.7 110.2
Overall length, mil 101 128 89 143 185 195 227 175 180.3
Overall Length, mm 2.5654 3.62966 4.953
Crystal thickness, mil 5 5 5 5 5 5 8 8 7
Rm @ air, kohm 160 40 40 2.5 4 4
C1, fF 1.06 2.2 2.2 3.5 2.2 2.2
Q, k 9.4 9.0 5.9 28.3 19.6 18.1
Tine wide, mm 0.21336 0.40132 0.21336 0.21336 0.40132 0.40132 0.0889 0.0889 0.0889
Tine length mm 1.31318 1.22428 0.99568 2.35966 3.1242 2.40792 2.17805 1.53289 1.39954
Thickness, mm 0.127 0.127 0.127 0.127 0.127 0.127 0.2032 0.2032 0.2
Stiffness, k, N/m out-plane 4140 9610 9498 714 578 1263 378 1084 1425.0
Stiffness, k, N/m in-plane 10894 89467 24993 1878 5384 11759 276 793 911.4

SPECS社 KolibriSensor

Advanced Quartz Sensor Technology for nc-AFM

kolibrisensor

Applications

  • Non-contact AFM
  • Combined AFM & STM
  • Low Temperature SMP
  • Nano Manipulations
  • Liquid AFM
  • Kelvin Probe Microscopy
  • Capacitance Microscopy
  • Scanning Gate Microscopy
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